Transition between the discharge regimes of high power impulse magnetron sputtering and conventional direct current magnetron sputtering
نویسندگان
چکیده
منابع مشابه
High power impulse magnetron sputtering discharge
J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2009
ISSN: 0963-0252,1361-6595
DOI: 10.1088/0963-0252/18/4/045008